OC OERLIKON BAIZERS

"DEVICE FOR THE DEGASSING OF A DISK-FORM SUBSTRATE"
Application: 6131/DELNP/2008 A, Filing date: 2008-07-14, Publication date: 2008-10-24
Applicant: 1)OC OERLIKON BAIZERS AG
Inventor: 1)BART SCHOLTE VAN MAST