DEVICE FOR TREATING OBJECTS BY PLASMA DEPOSITION
1583/DELNP/2004 A (1583/DELNP/2004)
Filed on 2004-06-07
Publication date 2007-02-09
A device for treating objects by plasma deposition, comprising: - a sealed treatment chamber (1), at a reduced pressure, provided on one of its walls (4) with a passage (2) that can be closed off , said passage (2) allowing objects for treatment (3) to be conveyed into and out of the treatment chamber (1) - a transfer space (5) which can be placed, via said passage (2), in communication with the treatment chamber (1) so that object for treatment (3) are introduced into the transfer space (5) prior to being introduced into the treatment chamber (1), the device being characterized in that the transfer space (5): - is delimited by discontinuous walls (6,7), - is able to move relative to the treatment chamber (1) so as to be able to negotiate the passage (2) of the treatment chamber (1).
Applicant
AISAPACK HOLDING S.A.
RUE DE LA PRAISE, CH-1896 VOUVRY SWITZERLAND Switzerland
Inventor
VOIGTMANN, JEAN-PIERRE
International Information
Classification
H01J37/32
Publication number
WO 03/054910
Application date
2002-12-16
Application number
PCT/CH02/00698