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An electrical component provides a ceramic element 264 located on or in a dielectric substrate 262 between and in contact with a pair of electrical conductors 260A..260B, wherein the ceramic element includes one or more metal oxides having fluctuations in metal- oxide compositional uniformity less than or equal to 1.5 mol% throughout the ceramic element. A method of fabricating an electrical component, provides or forming a ceramic element between and in contact with a pair of electrical conductors on a substrate including depositing a mixture of metalorganic precursors and causing simultaneous decomposition of the metal oxide precursors to form the ceramic element including one or more metal oxides. No. of Pages : 97 No. of Claims : 83