LOCK CHAMBER FOR VACCUM TREATMENT UNIT AND PORCEDURES FOR ITS OPERATION

Application 576/DEL/2005 published 2006-11-10, filed 2005-03-16
Lock chamber device for a vacuum treatment plant, especially a continuously operating in-line glass coating plant, with at least two, preferably two or three, sequentially arranged lock chambers (EK1, EK2) for carrying out a double-stage or a multi-stage pressure equalization process, and a first pump set (P1) for evacuating a first lock chamber, as well as a second pump set (P2, P3) for evacuating a second lock chamber, characterized in that said first pump set (P1) is connected wiht the first (EK1) as well as with the second (EK2) lock chamber by means of lockable conduits (1,2) so that the first pump set may evacuate either the first or the second or both lock chambers.

Applicant

1)APPLIED FILMS GMBH & CO.KG
:SIEMENSSTRASSE 100, 63755 ALZENAU, GERMANY Germany

Inventor

1)THOMAS GEBELE 2)JURGEN HENRICH 3)MANFRED WEIMANN

International Info

Classification: C23C 14/56

Priority Information

04 007 820.6 EUROPEAN UNION 2004-03-31