BigPatents India

The present invention relates to an infrared heating element (2) and a substrate heater type vacuum chamber, particularly for vacuum coating facilities. The infrared heating element (2) comprises a heating source (4) which is surrounded by a protective means designed as a tubular metal jacket (5). The tubular metal jacket (5) is provided at least to an extent with an infrared-emitting layer (6). The vacuum chamber comprises a substrate (1) and at least one heating element that is designed as an infrared heating element (2), the substrate (1) and infrared heating element (2) being thermally decoupled in such a way that only thermal radiation contributes towards heating.