COATER WITH A LARGE-AREA ASSEMBLY OF ROTATABLE MAGNETRONS

Application 1033/DEL/2005 published 2006-12-01, filed 2005-04-26
This invention relates to a coater for the coating, in particular, of large-area substrates by means of cathode sputtering, the coater having a coating chamber and, provided therein, a cathode assembly (2) where the material to be sputtered is located on a target (4) with a curved surface, the material to be sputtered is located in particular, on the lateral surface of a cylinder, there being in a single coating chamber for a coherent coating zone at least three, preferably more, cathode assemblies (2) with rotatable, curved targets (4) positioned one beside the other.

Applicant

1)APPLIED FILMS GMBH & CO. KG,
:SIEMENSSTRASSE 100, 63755 ALZENAU, GERMANY, Germany

Inventor

1)STEFAN BANGERT 2)FRANK FUCHS 3)RALPH LINDENBERG 4)ANDREAS LOPP 5)UWE SCHUSSLER 6)TOBIAS STOLLEY

International Info

Classification: C23C14/35

Priority Information

04 010 696.5 EUROPEAN UNION 2004-05-05