MICROFABRICATED ELASTOMERIC VALVE AND PUMP SYSTEMS

Application IN/PCT/2001/01602/MUM published 2006-01-06, filed 2001-12-18
A method of fabricating an elastomeric structure, comprising : forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate. Drawing : 40 Sheets Total Pages: 117

Applicant

CALIFORNIA INSTITUTE OF TECHNOLOGY
1200 EAST CALIFORNIA BLVD., PASADENA, CA 92115, U.S.A.

Inventor

1. MARC A. UNGER 2. HOU-PU CHOU 3. TODD A. THORSEN 4. AXEL SCHERER 5. STEPHEN R. QUAKE

International Info

Classification: F16K 17/00
Publication Number: WO 01/01025
Application Date: 2000-06-27

Priority Information

60/141,503 U.S.A. 1999-06-28
60/147,199 U.S.A. 1999-08-30
60/186,856 U.S.A. 2000-03-03