METHOD FOR OPERATING VACUUM INSTALLATIONS UNDER PRESSURE CHANGES
Application 7/KOL/2005 published 2006-12-01, filed 2005-01-06
Method for operating vacuum installations under pressure changes between operating pressure and ambient pressure, which comprise in a vacuum chamber (V) installed elements (13, 13a) from the group electronic components, transformers, motors, roller bearings and guide rollers, provided with ventilatable coverings, the guide rollers (12) being provided with roller bearings (24), secured within the coverings on supporting bodies (7,8). To protect these installed elements (13, 13a), including the guide rollers (12) and their roller bearings, against penetration of dust and other particles during the flooding of the vacuum chamber (V), it is proposed that before flooding the vacuum chamber (V) a gas is introduced into the coverings, through which solid bodies from the group dust and particles are blown out of the coverings and the penetration of solid bodies into the coverings is prevented. The approach herein is preferably such that the gas is ducted under regulation through the coverings during the entire flooding process of the vacuum chamber (V). (FIG). 1
Applicant
APPLIED FILMS GMBH & CO, KG.,
SIEMENSSTRASSE 100, D-63755 ALZENAU, GERMANY.
Inventor
STEFAN HEIN GUNTER KLEMM
International Info
Classification: F16C 33/66
Priority Information
04007325.6 EPO 2004-03-26