VACUUM CLOSURE WITH LINEAR DRIVE UNIT
Application 1271/DEL/2005 published 2007-01-12, filed 2005-05-18
This invention relates to a vacuum treatment installation and a device therefore for the tight, especially vauum-tight closing of an aperture, in particular a slit-like or rectangular aperature with a length that is preferably a multiple of the width of the aperture, in particular for a lock arrangement of a vacuum treatment installation, said device having a closure member (2) and for said closure member a linear drive unit (3,4,5) which, by way of a translational movement, can move the closure member from an open position into a closed position, said closure member having a sealing surface which is disposed ina plane (16) and which, in the closed position, makes sealing contact with a counter-sealing surface on the aperture side, and said plane running perpenducular to the direction of the translational movement (14) and at an oblique angle to the aperture normal (13).
Applicant
1)APPLIED FILMS CMBH & CO.KG
:SIEMENSSTRASSE 100, 63755 ALZENAU, GERMANY Germany
Inventor
1)STEFAN BANGERT 2)MICHAEL KOING 3)RALPH LINDERNBERG 4)UWE SCHUSSLER 5)TOBIAS STOLLEY 6)FRANK FUCHS
International Info
Classification: C23C 14/00
Priority Information
04 013 151.8 EUROPEAN UNION 2004-06-03