"DECAL TRANSFER MICROFABRICATION"
Application 701/DELNP/2005 published 2007-01-19, filed 2005-02-22
A method of making a microstructure includes forming a pattern in a surface of a silicon-containing elastomer, oxidizing the pattern, contacting the pattern with a substrate; and bonding the oxidized pattern and the substrate such that the pattern and the substrate are irreversibly attached. The silicon-containing elastomer may be removably attached to a transfer pad.
Applicant
1)BOARD OF TRUSTEES OF UNIVERSITY OF ILLINOIS
:353 HENRY ADMINISTRATION BUILDING, 506 S. WRIGHT, URBANA, ILLINOIS 61801, USA U.S.A.
Inventor
1)RALPH G. NUZZO 2)WILLIAM ROBERT CHILDS
International Info
Classification: G03F 7/00
Publication Number: WO 2004/0210854
Application Date: 2003-08-28
Priority Information
10/230,882 U.S.A. 2002-08-28